Method of forming semiconductor device including polysilicon structures

ABSTRACT

A method of making a semiconductor device includes depositing a first polysilicon layer over a substrate. The method further includes forming a barrier layer over the first polysilicon layer. The method further includes patterning the first polysilicon layer. The method further includes depositing a second polysilicon layer over the barrier layer, wherein the depositing of the second polysilicon layer includes increasing a grain size of the first polysilicon layer, and causing at least one grain boundary in the first polysilicon layer to contact the barrier layer.

RELATED APPLICATION

This application is a divisional of U.S. application Ser. No. 15/685,220, filed Aug. 24, 2017, which claims the benefit of U.S. Provisional Application No. 62/511,473, filed May 26, 2017, which are hereby incorporated by reference in their entireties.

BACKGROUND

Polysilicon structures, such as transistor gate structures and resistors, are used in a variety of devices. During manufacturing of a complete semiconductor device, the polysilicon structure is subjected to numerous thermal processes. The thermal processes increase a grain size within the polysilicon structures.

Doping of the polysilicon structures is used to control resistance for an electrical signal passing through the polysilicon structure. The dopants migrate along grain boundaries in the polysilicon structures. The amount of resistance in the polysilicon structures is a factor in power consumption of a semiconductor device including the polysilicon structures.

BRIEF DESCRIPTION OF THE DRAWINGS

Aspects of the present disclosure are best understood from the following detailed description when read with the accompanying figures. It is noted that, in accordance with the standard practice in the industry, various features are not drawn to scale. In fact, the dimensions of the various features may be arbitrarily increased or reduced for clarity of discussion.

FIG. 1 is a flowchart of a method of forming a semiconductor device according to some embodiments.

FIGS. 2A-2E are cross-sectional views of a semiconductor device at various stages of manufacture according to some embodiments.

FIG. 3 is a cross-sectional view of a gate structure according to some embodiments.

FIG. 4 is a flowchart of a method of forming polysilicon structures according to some embodiments.

FIGS. 5A-5D are cross-sectional views of polysilicon structures at various stages of manufacture according to some embodiments.

FIG. 6 is a cross-sectional view of a gate structure according to some embodiments.

FIG. 7 is a cross-sectional view of a gate structure including dopants according to some embodiments.

DETAILED DESCRIPTION

The following disclosure provides many different embodiments, or examples, for implementing different features of the provided subject matter. Specific examples of components, values, operations, materials, arrangements, or the like, are described below to simplify the present disclosure. These are, of course, merely examples and are not intended to be limiting. Other components, values, operations, materials, arrangements, or the like, are contemplated. For example, the formation of a first feature over or on a second feature in the description that follows may include embodiments in which the first and second features are formed in direct contact, and may also include embodiments in which additional features may be formed between the first and second features, such that the first and second features may not be in direct contact. In addition, the present disclosure may repeat reference numerals and/or letters in the various examples. This repetition is for the purpose of simplicity and clarity and does not in itself dictate a relationship between the various embodiments and/or configurations discussed.

Further, spatially relative terms, such as “beneath,” “below,” “lower,” “above,” “upper” and the like, may be used herein for ease of description to describe one element or feature's relationship to another element(s) or feature(s) as illustrated in the figures. The spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. The apparatus may be otherwise oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein may likewise be interpreted accordingly.

Polysilicon structures are used in a variety of semiconductor devices, such as memory devices, logic devices, and other suitable devices. Providing stable and predictable resistance within polysilicon structures helps to increase stability of an operating voltage of the semiconductor device and increase predictability of power consumption. As device sizes shrink, an importance of battery life for semiconductor devices, such as portable devices for the internet of things (IOT), increases. Accurate prediction of power consumption by the semiconductor device helps to reduce overdesign of batteries and facilitate a continued decrease in device sizes. Semiconductor devices like static random access memory (SRAM) are also effected by a stability of an operating voltage across different polysilicon structures. For example, an increased resistance in a polysilicon gate structure will, in some instances, decrease a speed of a signal through the SRAM to a point that an incorrect value is read out of the SRAM, i.e., a “0” is read instead of a “1” and vice versa.

Conductivity of the polysilicon structures is determined in part based on a dopant concentration in the polysilicon structures. As dopant concentration increases, conductivity also increases. Dopants in polysilicon structures migrate along grain boundaries of the polysilicon structures. In addition, the decrease in device size results in more densely located devices and an increase in a number of thermal processes performed during manufacturing the semiconductor device. These thermal processes cause grain sizes in the polysilicon structures to increase. The increased grain sizes reduce migration paths for dopants within the polysilicon structure, which in turn reduces a number of conductive paths through the polysilicon structure and increases resistance of the polysilicon structure. Further, the increase in grain sizes is not easily controlled within a continuous polysilicon material. The difficulty in controlling grain size growth within a continuous polysilicon material decreases a level of predictability of the resistance of different polysilicon structures within a same semiconductor device.

In order to control a size of grains within polysilicon structures, at least one barrier layer is used to reduce or prevent grain growth. Grain boundaries which contact the barrier layer cease expanding, which inhibits increases in grain size within the polysilicon structures. As a result, resistance of the polysilicon structures within a semiconductor device is lower and more uniform in comparison with polysilicon structures which do not include the at least one barrier layer. The increased uniformity of resistance of the polysilicon structures helps with the design of memory devices by reducing a risk of memory errors resulting from signal delays cause by unpredictable resistance values. The lower and more uniform resistance also reduces an amount of overdesign for batteries in portable devices to help facilitate reduction in overall device size.

FIG. 1 is a flowchart of a method 100 of making a semiconductor device according to some embodiments. Method 100 includes operation 110 in which a polysilicon layer is deposited on a substrate. The polysilicon layer is deposited to thickness ranging from 10 nanometers (nm) to 400 nm. The thickness of the polysilicon layer is determined based on a technology node of a semiconductor device in which the polysilicon structures are included. As a size of the technology node decreases, the thickness of the polysilicon layer decreases. In some embodiments, the semiconductor device is manufactured using a technology node such as N90, N55, N40 or another suitable technology node.

In some embodiments, the polysilicon layer is deposited over a dielectric layer, such as an interfacial layer, a gate dielectric layer, an isolation feature or another suitable dielectric layer. In some embodiments, the polysilicon layer is deposited using a chemical vapor deposition (CVD), such as a low-pressure CVD (LPCVD). In some embodiments, the polysilicon layer is deposited using a silane (SiH₄) precursor.

In some embodiments, the polysilicon layer is deposited at a temperature ranging from about 450° C. to about 620° C. A deposition temperature of the polysilicon layer impacts a grain size of the polysilicon layer deposited. The grain size of the polysilicon layer in turn impacts a number of possible conductive paths within the polysilicon structures. As the deposition temperature increases, a size of the grains in the polysilicon layer increases.

In optional operation 120, the polysilicon layer is doped. In some embodiments, operation 120 is performed simultaneously with operation 110, i.e., an in-situ doping during deposition of the polysilicon layer. In-situ doping includes incorporating a dopant material, such as arsenic, phosphorous, boron or another suitable dopant, into the flow of material, e.g., silane, used to deposit the polysilicon layer.

In some embodiments, operation 120 includes an ion implantation process. In some embodiments, the ion implantation occurs at an energy ranging from about 30 kilo electronvolts (KeV) to 75 KeV. As the energy of the implantation process increases a depth of the dopant implanted into the polysilicon layer increases. Thus, an energy of the implantation process is determined in part based on a thickness of the polysilicon layer. Further, a higher implantation energy damages a crystal structure of the polysilicon layer which increases a resistance of the polysilicon layer. A target resistance of the polysilicon structures is also a factor in selecting the implantation energy. In some embodiments, the dosage of the dopant implanted ranges from about 5E14 atoms/cm² to about 1E16 atoms/cm². As a dosage increases resistance in the polysilicon layer decreases.

In some embodiments, operation 120 includes depositing a layer of dopant material on the polysilicon layer and annealing the semiconductor device to drive the dopants into the polysilicon layer. In some embodiments, operation 120 is omitted and a doping process is performed after operation 150 of method 100.

In operation 130, the polysilicon layer is patterned to define locations of polysilicon structures. In some embodiments, the patterning process includes depositing a photoresist over the polysilicon layer. A lithography process is then used to pattern the photoresist. The pattern is then developed to remove portions of the photoresist corresponding to portions of the polysilicon layer to be removed. The polysilicon layer is then etched using the patterned photoresist as a mask. In some embodiments, the etching process includes a wet etching process. In some embodiments, the wet etchant includes nitric acid, hydrochloric acid or another suitable etchant. In some embodiments, the etching process includes a dry etching process. In some embodiments, the dry etchant includes chlorine-containing gas, fluorine-containing gas or another suitable etchant. In some embodiments, the photoresist is removed during the etching process. In some embodiments, an ashing process is used to remove residual photoresist following the etching process.

In some embodiments, the polysilicon layer is patterned using a laser drilling process or another suitable material removal process. Following, the patterning process, one or more polysilicon structures are defined on the substrate. In some embodiments, at least one polysilicon structure is over an n-doped region of the substrate and another polysilicon structure is over a p-doped region of the substrate.

In operation 140, a barrier layer is formed over the polysilicon structures. A thickness of the barrier layer near a center of each polysilicon structure is less than a thickness of the barrier layer near an edge of the polysilicon structure. The increased thickness of the barrier layer near the edge of the polysilicon structure is a result of formation of the barrier layer at the sidewalls of the polysilicon structure as well as a top surface of the polysilicon structure. The formation of the barrier layer at the sidewalls of the polysilicon structure is result of the patterning of the polysilicon layer prior to formation of the barrier structures. The formation of the barrier structures acts on both the top surface of the patterned polysilicon structure as well as the sidewalls of the patterned silicon structure resulting in increased thickness of the barrier layer near the sidewalls of the patterned polysilicon layer. In some embodiments, a thickness of the barrier layer near a center of the polysilicon structure ranges from about 0.3 nm to about 1.5 nm. In some embodiments, a thickness of the barrier layer near an edge of the polysilicon structure ranges from about 2 nm to about 10 nm. As a thickness of the barrier layer increases, a resistance in the polysilicon structure increases. If a thickness of the barrier layer is too small, the barrier layer will not be able to inhibit increases in grain size in the polysilicon material. In some embodiments, a thickness of the barrier layer over the center region of the polysilicon structure is substantially uniform and the thickness increases in a gradient a distance D from the edge of the polysilicon structure. In some embodiments, the distance D ranges from about 2 nm to about 3 nm from the edge of the polysilicon structure. As the distance D increases the resistance of the polysilicon structure increases. The distance D is determined by a rate of formation of the barrier layer at the edge of the polysilicon structure.

The barrier layer has a dielectric constant ranging from about 2 to about 13. In some embodiments, the barrier layer includes silicon oxide, silicon nitride, silicon oxynitride, silicon carbide or another suitable barrier material. In some embodiments, the silicon oxynitride is represented by SiO_(a)N_(b), where a ratio of a/b ranges from about 0.1 to about 10. In some embodiments, the silicon nitride is represented by Si_(x)N_(y), where a ratio of x/y ranges from about 0.1 to about 10.

In some embodiments, the barrier layer is formed by physical vapor deposition (PVD), CVD, ALD or another suitable deposition process. In some embodiments, the barrier layer is formed by exposing the polysilicon structure to an ambient environment containing oxygen. In some embodiments, an oxygen-containing gas is blown across the polysilicon structures. A thickness of the barrier layer is determined by a duration of the formation process. For example, as a length of time that the polysilicon is exposed to the ambient environment containing oxygen increases, a thickness of the barrier increases. In some embodiments, a temperature of the barrier layer formation process ranges from about 25° C. to about 1100° C. A higher temperature increases a size of grains in the polysilicon structure. In some embodiments,

In some embodiments, the barrier layer is doped. In some embodiments, a species of dopant in the barrier layer is a same species as that in the polysilicon structures. In some embodiments, a species of dopant in the barrier layer is different from a species of dopant in the polysilicon structures. In some embodiments, the barrier is doped by an in-situ process, an ion implantation process, an anneal process (which drives dopants from the polysilicon structures into the barrier layer) or another suitable process.

In operation 150, whether the Height of the polysilicon structures including the barrier layer satisfies a threshold value is determined. The height is measured form a top surface of the substrate in a direction perpendicular to the top surface of the substrate. The threshold value is determined based on a technology node of the semiconductor device. In some embodiments, the threshold value ranges from about 20 nm to 400 nm. As a size of the technology node decreases, the threshold value decreases. In some embodiments, the threshold value is larger than a desired final height of the polysilicon structure including the barrier layer to account for a subsequent material removal process, such as a planarization process.

If the height fails to satisfy the threshold value, then method 100 returns to operation 110 and an additional polysilicon layer is deposited. The sequence of operations 110-140 are repeated until the height satisfies the threshold value. In some embodiments, operation 140 is omitted in a final repetition of operations 110-140. In some embodiments where operation 140 is not omitted in the final repetition, a top-most barrier layer is removed using a material removal process, such as etching, planarization, or another suitable material removal process.

If the height satisfies the threshold value, then method 100 proceeds to operation 160 in which processes for completion of a gate structure or a resistor structure are completed. A gate structure is formed where the polysilicon structure is over a conductive region of the substrate. A resistor structure is formed where the polysilicon structure is over a non-conductive region of the substrate, such as an isolation feature. The subsequent processes include formation of spacers; formation of source/drain features; formation of lightly doped drain (LDD) features; formation of an inter-layer dielectric (ILD); formation of contact plugs; formation of interconnect structures; or other suitable processes.

In some embodiments, method 100 includes additional operations. For example, in some embodiments, method 100 includes an operation for removing a top most barrier layer over a top most polysilicon structure. In some embodiments, an order of operations is adjusted. For example, in some embodiments, operation 140 is performed prior to operation 130. In some embodiments, at least one operation of method 100 is omitted. For example, in some embodiments, operation 120 is omitted and a single doping process is performed during operation 160.

FIGS. 2A-2E are cross-sectional view of a semiconductor device at various stages of manufacturing according to some embodiments. Same reference numbers correspond to same elements in each of the Figures. FIG. 2A is a cross-sectional view of a semiconductor device 200 following deposition of polysilicon layer 220 according to some embodiments. Polysilicon layer 220 is on substrate 210. In some embodiments, a dielectric layer, such as an interfacial layer, a gate dielectric, an isolation structure or another suitable dielectric layer, is between at least a portion of polysilicon layer 220 and substrate 210. A thickness of polysilicon layer 220 ranges from about 10 nm to about 400 nm. In some embodiments, polysilicon layer 220 is doped.

FIG. 2B is a cross-sectional view of semiconductor device 200′ following patterning of the polysilicon layer according to some embodiments. In comparison with semiconductor device 200, semiconductor device 200′ includes polysilicon structures 220 a and 220 b. Polysilicon structure 220 a is part of a gate structure 250 a. Polysilicon structure 220 b is part of a gate structure 250 b. Polysilicon structures 220 a and 220 b are formed by removing portions of polysilicon layer 220, such as by using a lithography and etching process.

In some embodiments, a portion of substrate 210 below polysilicon structure 220 a has a different dopant type from a portion of substrate 210 below polysilicon structure 220 b. In some embodiments, an isolation feature, such as a shallow trench isolation (STI), is in substrate 210 below polysilicon structure 220 a or polysilicon structure 220 b. Semiconductor device 200′ includes two polysilicon structures 220 a and 220 b. In some embodiments, semiconductor device 200′ includes more than two polysilicon structures.

FIG. 2C is a cross-sectional view of semiconductor device 200″ following formation of barrier layers 230 a and 230 b according to some embodiments. In comparison with semiconductor device 200′, semiconductor device 200″ includes barrier layer 230 a over polysilicon structure 220 a; and barrier layer 230 b over polysilicon structure 220 b. Barrier layers 230 a and 230 b independently have a dielectric constant ranging from about 2 to about 13. In some embodiments, barrier layers 230 a and 230 b include silicon oxide, silicon nitride, silicon oxynitride, silicon carbide or another suitable barrier material. In some embodiments, barrier layer 230 a includes a same material as barrier layer 230 b. In some embodiments, barrier layer 230 a includes a different material from barrier layer 230 b.

A thickness of each of barrier layers 230 a and 230 b near a center of a corresponding polysilicon structure 220 a or 220 b is less than a thickness of the barrier layer 230 a or 230 b near an edge of the corresponding polysilicon structure 220 a or 220 b. In some embodiments, a thickness of the barrier layers 230 a and 230 b near a center of the corresponding polysilicon structure 220 a or 220 b ranges from about 0.3 nm to about 1.5 nm. In some embodiments, a thickness of the barrier layers 230 a and 230 b near an edge of the corresponding polysilicon structure 220 a and 220 b ranges from about 2 nm to about 10 nm. As a thickness of the barrier layer increases, a resistance in the polysilicon structure increases. If a thickness of the barrier layer is too small, the barrier layer will not be able to inhibit increases in grain size in the polysilicon material. In some embodiments, a thickness of the barrier layers 230 a and 230 b over the center region of the corresponding polysilicon structure 220 a or 220 b is substantially uniform and the thickness increases in a gradient a distance D toward the edge of the corresponding polysilicon structure 220 a or 220 b. In some embodiments, the distance D ranges from about 2 nm to about 3 nm from the edge of the polysilicon structure 220 a or 220 b. As the distance D increases the resistance of the polysilicon structure 220 a or 220 b increases.

In some embodiments, a thickness profile of barrier layer 230 a matches a thickness profile of barrier layer 230 b. In some embodiments, the thickness profile of barrier layer 230 a is different from the thickness profile of barrier layer 230 b. For examples, in some embodiments, a center thickness of both barrier layers 230 a and 230 b is the same, but a thickness of barrier layer 230 a near an edge of polysilicon structure 220 a is different from a thickness of barrier layer 230 b near an edge of polysilicon structure 220 b.

FIG. 2D is a cross-sectional view of semiconductor device 200* after deposition of a second polysilicon layer 240 according to some embodiments. In comparison with semiconductor device 200″, semiconductor device 200* includes polysilicon layer 240 over portions of substrate 210 exposed by polysilicon structures 220 a and 220 b. Polysilicon layer 240 is also over barrier layers 230 a and 230 b. A thickness of polysilicon layer 240 ranges from about 10 nm to about 400 nm. In some embodiments, polysilicon layer 240 has a same thickness as polysilicon layer 220. In some embodiments, polysilicon layer 240 has a different thickness from polysilicon layer 220. In some embodiments, polysilicon layer 240 is deposited using a same process as that used for polysilicon layer 220. In some embodiments, polysilicon layer 240 is deposited using a different process from that used for polysilicon layer 220. In some embodiments, polysilicon layer 240 is doped.

FIG. 2E is a cross-sectional view of semiconductor device 200{circumflex over ( )} following patterning of the polysilicon layer 240 according to some embodiments. In comparison with semiconductor device 200*, semiconductor device 200{circumflex over ( )} includes polysilicon structure 240 a over barrier layer 230; and polysilicon structure 240 b over barrier layer 230 b. Polysilicon structure 240 a is part of a gate structure 250 a. Polysilicon structure 240 b is part of a gate structure 250 b. Polysilicon structures 240 a and 240 b are formed by removing portions of polysilicon layer 240, such as by using a lithography and etching process. In some embodiments, the removal process for forming polysilicon structures 240 a and 240 b is a same as the removal process to form polysilicon structures 220 a and 220 b. In some embodiments, the removal process for forming polysilicon structures 240 a and 240 b is different from the removal process to form polysilicon structures 220 a and 220 b.

FIG. 3 is a cross-sectional view of a gate structure 300 according to some embodiments. Gate structure 300 includes polysilicon structures 310 a, 310 b and 310 c, collectively referred to as polysilicon structures 310. Gate structure 300 further includes barrier layers 320 a and 320 b, collectively referred to as barrier layers 320. While gate structure 300 includes two barrier layers, in some embodiments, a number of barrier layers in gate structure 300 ranges from 1 to about 10. Barrier layers 320 independently have a dielectric constant ranging from about 2 to about 13. Barrier layer 320 a is between polysilicon structure 310 a and polysilicon structure 310 b. Barrier layer 320 b is between polysilicon structure 310 b and polysilicon structure 310 c. A grain size in polysilicon structure 310 a is greater than a grain size in polysilicon structure 310 b. A grain size in polysilicon structure 310 b is greater than a grain size in polysilicon structure 310 c. The larger grain sizes are the result of the lower polysilicon structures 310 being subjected to a greater number of thermal processes.

A thickness He of the barrier layers 320 near a center of polysilicon structures 310 is less than a thickness He of the barrier layers 320 near an edge of the polysilicon structures 310. In some embodiments, thickness He of the barrier layers 320 near a center of the polysilicon structures 310 independently ranges from about 0.3 nm to about 1.5 nm. In some embodiments, thickness He of the barrier layers 320 near an edge of the polysilicon structures 310 independently ranges from about 2 nm to about 10 nm. In some embodiments, a thickness profile of barrier layer 320 a is a same as a thickness profile of barrier layer 320 b. In some embodiments, the thickness profile of barrier layer 320 a is different from the thickness profile of barrier layer 320 b. As a thickness of the barrier layers 320 increase, a resistance in the gate structure 300 increases. If a thickness of the barrier layers 320 is too small, the barrier layers will not be able to inhibit increases in grain size in the polysilicon structures 310. In some embodiments, a thickness of the barrier layers 320 over the center region of the polysilicon structures 310 is substantially uniform and the thickness increases in a gradient a distance D from the edge of the polysilicon structures 310. In some embodiments, the distance D independently ranges for each of the barrier layers 320 from about 2 nm to about 3 nm from the edge of the polysilicon structure. As the distance D increases the resistance of the gate structure 300 increases.

A thickness Hp of polysilicon structures 310 independently ranges from about 10 nm to about 400 nm. In some embodiments, at least one of polysilicon structures 310 is doped. The thickness Hp of polysilicon structures 310 is determined based on a technology node of the semiconductor device containing gate structure 300. A gate height Hg of gate structure 300 ranges from about 15 nm to about 410 nm. The gate height Hg of gate structure 300 is determined based on a technology node of the semiconductor device containing gate structure 300.

FIG. 4 is a flowchart of a method 400 of making a semiconductor device according to some embodiments. In comparison with method 100, method 400 includes a patterning operation following the polysilicon layers and barrier layers satisfying the height threshold. The single patterning process helps to reduce complexity of method 400 in comparison with other approaches. Also, the barrier layers formed in method 400 have a substantially constant thickness because the formation process act on the top surface of the polysilicon layer with minimal actions on sidewalls of the polysilicon.

In operation 410, a polysilicon layer is deposited on the substrate. Operation 410 is similar to operation 110; and the above discussion of operation 110 is applicable to operation 410. In some embodiments, the polysilicon layer is deposited on a dielectric layer, such as an interfacial layer, a gate dielectric layer, an isolation structure or another suitable dielectric layer.

In optional operation 420, the polysilicon layer is doped. Operation 420 is similar to operation 120; and the above discussion of operation 120 is applicable to operation 420. In some embodiments, operation 420 is omitted and a single doping process is performed in operation 460.

In operation 430, a barrier layer is formed over the polysilicon layer. In comparison with operation 140, operation 430 is performed on a polysilicon layer not on a patterned polysilicon structure. As a result, the process for forming the barrier layer acts on the top surface of the polysilicon layer and on the sidewalls of the polysilicon layer at the edge of the substrate. The formation process acting primarily on the top surface of the polysilicon layer means that the thickness of the barrier layer formed by operation 430 is substantially constant. Variations in the thickness result from process gradients and imperfections in crystal structure of the polysilicon layer, in some instances; however, the thickness of the barrier layer is substantially constant. The formation processes for forming the barrier layer in operation 430 are similar to the processes for forming the barrier layer in operation 140; and the discussion is not repeated here for the sake of brevity.

In operation 440, the height of the polysilicon layer and barrier layer is compared to a threshold value. The determination of the threshold value is based on the technology node of the semiconductor device. The discussion of operation 150 above is applicable to operation 440 and is not repeated here for the sake of brevity. If the height fails to satisfy the threshold value, then method 400 returns to operation 410. Similar to method 100, in some embodiments of method 400, formation of the barrier layer over a top most polysilicon layer is omitted. In some embodiments, method 400 further includes an operation for removing a top-most barrier layer over a top-most polysilicon layer.

If the height satisfies the threshold value, method 400 proceeds to operation 450. In operation 450, the polysilicon layers and barrier layers are patterned to define a location of gate structures or resistor structures. Gate structures are located over conductive regions of the substrate. Resistor structures are located over non-conductive regions, such as isolation structures, of the substrate.

In some embodiments, the patterning process is performed using a photoresist as a mask for an etching process. A discussion of the use of a photoresist to create a mask for etching is provided above in with respect to operation 130. The description is not repeated for the sake of brevity. An etching process for operation 450 is either a wet etching process or a dry etching process. In some embodiments, different etchants are used to remove material from a barrier layer from that used to remove material from a polysilicon layer due to differences in etch selectivity. For example, in some embodiments, a chlorine-containing etchant is used to remove material from polysilicon layers; and a fluorine-containing etchant is used to remove material from barrier layers. In some embodiments, a material removal process other than etching, e.g., laser drilling, is used for operation 450.

In operation 460, additional processes are used to complete formation of gate structures or resistor structures. Operation 460 is similar to operation 160; and the discussion above for operation 160 is applicable for operation 460.

In some embodiments, method 400 includes additional operations. For example, in some embodiments, method 400 includes an operation for removing a top most barrier layer over a top most polysilicon layer. In some embodiments, an order of operations is adjusted. For example, in some embodiments, operation 430 is performed prior to operation 420. In some embodiments, at least one operation of method 400 is omitted. For example, in some embodiments, operation 420 is omitted and a single doping process is performed during operation 160.

FIGS. 5A-5D are cross-sectional views of a semiconductor device at various stages of manufacturing according to some embodiments. Same reference numbers correspond to same elements in each of the Figures. FIG. 5A is a cross-sectional view of a semiconductor device 500 following deposition of polysilicon layer 520 according to some embodiments. Polysilicon layer 520 is on substrate 210. In some embodiments, a dielectric layer, such as an interfacial layer, a gate dielectric, an isolation structure or another suitable dielectric layer, is between at least a portion of polysilicon layer 520 and substrate 510. A thickness of polysilicon layer 520 ranges from about 10 nm to about 400 nm. In some embodiments, polysilicon layer 520 is doped.

FIG. 5B is a cross-sectional view of semiconductor device 200′ following formation of barrier layer 530 according to some embodiments. In comparison with semiconductor device 500, semiconductor device 500′ includes barrier layer 530 over polysilicon layer 520. In some embodiments, barrier layer 530 includes silicon oxide, silicon nitride, silicon oxynitride, silicon carbide or another suitable barrier material. In some embodiments, barrier layer 230 a includes a same material as barrier layer 230 b. A thickness of barrier layer 230 is substantially constant. In some embodiments, a thickness of the barrier layer ranges from about 0.3 nm to about 5 nm. As a thickness of the barrier layer increases, a resistance in the polysilicon structure increases. If a thickness of the barrier layer is too small, the barrier layer will not be able to inhibit increases in grain size in the polysilicon material.

FIG. 5C is a cross-sectional view of semiconductor device 500″ after deposition of a second polysilicon layer 540 according to some embodiments. In comparison with semiconductor device 500′, semiconductor device 500″ includes polysilicon layer 540 over barrier layer 530. A thickness of polysilicon layer 540 ranges from about 10 nm to about 400 nm. In some embodiments, polysilicon layer 540 has a same thickness as polysilicon layer 520. In some embodiments, polysilicon layer 540 has a different thickness from polysilicon layer 520. In some embodiments, polysilicon layer 540 is deposited using a same process as that used for polysilicon layer 520. In some embodiments, polysilicon layer 540 is deposited using a different process from that used for polysilicon layer 520. In some embodiments, polysilicon layer 540 is doped.

FIG. 5D is a cross-sectional view of semiconductor device 200* following patterning of the polysilicon layers 520 and 540 and barrier layer 530 according to some embodiments. In comparison with semiconductor device 500″, semiconductor device 500* includes gate structures 550 a and 550 b. Polysilicon structure 520 a; barrier layer 530 a and polysilicon structure 540 a are part of a gate structure 250 a. Polysilicon structure 520 b; barrier layer 530 b and polysilicon structure 540 b are part of a gate structure 250 b. Gate structures 550 a and 520 b are formed by removing portions of polysilicon layer 520; barrier layer 530 and polysilicon layer 540, such as by using a lithography and etching process.

In some embodiments, a portion of substrate 510 below gate structure 550 a has a different dopant type from a portion of substrate 510 below gate structure 550 b. In some embodiments, an isolation feature, such as a shallow trench isolation (STI), is in substrate 510 below gate structure 550 a or gate structure 550 b. Semiconductor device 500* includes two gate structures 550 a and 550 b. In some embodiments, semiconductor device 500* includes more than two gate structures.

FIG. 6 is a cross-sectional view of a gate structure 600 according to some embodiments. Gate structure 600 includes polysilicon structures 610 a, 610 b, 610 c and 610 d, collectively referred to as polysilicon structures 610. Gate structure 600 further includes barrier layers 620 a, 620 b and 620 c, collectively referred to as barrier layers 620. While gate structure 600 includes three barrier layers, in some embodiments, a number of barrier layers in gate structure 600 ranges from 1 to about 10. Barrier layers 620 independently have a dielectric constant ranging from about 2 to about 13. Barrier layer 620 a is between polysilicon structure 610 a and polysilicon structure 610 b. Barrier layer 620 b is between polysilicon structure 610 b and polysilicon structure 610 c. Barrier layer 620 c is between polysilicon structure 610 c and polysilicon structures 610 d. A grain size in polysilicon structure 610 a is greater than a grain size in polysilicon structure 610 b. A grain size in polysilicon structure 610 b is greater than a grain size in polysilicon structure 610 c. A grain size of in polysilicon structure 610 c is greater than a grain size in polysilicon structure 610 d. The larger grain sizes are the result of the lower polysilicon structures 610 being subjected to a greater number of thermal processes.

A thickness Hb of the barrier layers 620 is substantially constant across gate structure 600. In some embodiments, thickness Hb of the barrier layers 320 independently ranges from about 0.3 nm to about 5 nm. As a thickness of the barrier layers 620 increase, a resistance in the gate structure 600 increases. If a thickness of the barrier layers 620 is too small, the barrier layers will not be able to inhibit increases in grain size in the polysilicon structures 610.

A thickness Hp of polysilicon structures 610 independently ranges from about 10 nm to about 400 nm. In some embodiments, at least one of polysilicon structures 610 is doped. The thickness Hp of polysilicon structures 610 is determined based on a technology node of the semiconductor device containing gate structure 600. A gate height Hg of gate structure 600 ranges from about 15 nm to about 410 nm. The gate height Hg of gate structure 600 is determined based on a technology node of the semiconductor device containing gate structure 600.

FIG. 7 is a cross-sectional view of a gate structure 700 according to some embodiments. Gate structure 700 includes polysilicon structures 710 a and 710 b, collectively referred to as polysilicon structures 710. Gate structure 700 further includes barrier layer 720. Barrier layer 720 is between polysilicon structure 710 a and polysilicon structure 710 b. A grain size in polysilicon structure 710 a is greater than a grain size in polysilicon structure 710 b. The larger grain sizes are the result of the lower polysilicon structures 710 being subjected to a greater number of thermal processes. Gate structure 700 also includes dopants 730.

Dopants 730 are located along grain boundaries in polysilicon structures 710. Dopants 730 are also present in barrier layer 720. In some embodiments, dopants 730 are driven into barrier layer 720 during an annealing process to active the dopants. In some embodiments, dopants 730 are implanted into barrier layer 720.

In comparison with other approaches, maintaining smaller grain sizes in polysilicon structures 710 helps to create numerous conductive paths through gate structure 700. As a number of conductive paths in gate structure 700 increase, the resistance of gate structure 700 decreases. The smaller grain boundaries also result in a more even distribution of dopants 730 in gate structure 700 as compared to other approaches. The even distribution helps to increase predictability of performance of gate structure 700 in relation with other gate structures in a same semiconductor device. The increased predictability of performance increases precision in data retrieval in memory devices which include barrier layer 720; and reduce overdesign of batteries for devices which include barrier layer 720.

While barrier layer 720 is depicted as having a substantially constant thickness, similar to barrier layers 620 (FIG. 6); the above discussion about dopants 730 is also applicable to barrier layers having varying thicknesses, such as barrier layers 320 (FIG. 3).

An aspect of this description relates to a method of making a semiconductor device. The method includes depositing a first polysilicon layer over a substrate. The method further includes forming a barrier layer over the first polysilicon layer. The method further includes patterning the first polysilicon layer. The method further includes depositing a second polysilicon layer over the barrier layer, wherein the depositing of the second polysilicon layer comprises increasing a grain size of the first polysilicon layer, and causing at least one grain boundary in the first polysilicon layer to contact the barrier layer. In some embodiments, patterning of the first polysilicon layer occurs prior to the forming of the barrier layer. In some embodiments, the patterning of the first polysilicon layer occurs after the forming of the barrier layer. In some embodiments, the depositing of the second polysilicon layer includes depositing a portion of the second polysilicon in direct contact with the substrate. In some embodiments, forming of the barrier layer includes exposing the first polysilicon layer to oxygen. In some embodiments, the method further includes doping the first polysilicon layer. In some embodiments, doping of the first polysilicon layer includes performing an in-situ doping of the first polysilicon layer. In some embodiments, doping of the first polysilicon layer occurs after the depositing of the second polysilicon layer.

An aspect of this description relates to a method of making a semiconductor device. The method includes depositing a first polysilicon layer over a substrate. The method further includes patterning the first polysilicon layer to define a plurality of polysilicon structures. The method further includes forming a barrier layer over the plurality of polysilicon structures. The method further includes depositing a second polysilicon layer over the barrier layer, wherein the depositing of the second polysilicon layer comprises increasing a grain size of the first polysilicon layer in each of the plurality of polysilicon structures, and causing a grain boundary in at least one of the plurality of polysilicon structure to contact the barrier layer. In some embodiments, the method further includes doping the plurality of polysilicon structures. In some embodiments, doping the plurality of polysilicon structures includes doping the plurality of polysilicon structures prior to forming the barrier layer. In some embodiments, doping the plurality of polysilicon structures includes doping the plurality of polysilicon structure after forming the barrier layer. In some embodiments, depositing the second polysilicon layer includes blanket depositing the second polysilicon layer. In some embodiments, forming the barrier layer comprises forming the barrier layer includes a first portion in a central region of a polysilicon structure of the plurality of polysilicon structures having a uniform thickness, and a second portion in a peripheral region of the polysilicon structure having a variable thickness. In some embodiments, forming the barrier layer includes depositing the barrier layer. In some embodiments, forming the barrier layer includes oxidizing the plurality of polysilicon structures.

An aspect of this description relates to a method of making a semiconductor device. The method includes depositing a first polysilicon layer over a substrate. The method further includes forming a barrier layer over the first polysilicon layer. The method further includes depositing a second polysilicon layer over the barrier layer, wherein the depositing of the second polysilicon layer comprises increasing a grain size of the first polysilicon layer, and the grain size of the first polysilicon layer, following the depositing of the second polysilicon layer, is greater than a grain size of the second polysilicon layer. The method further includes patterning the first polysilicon layer, the barrier layer and the second polysilicon layer to define a plurality of structures. In some embodiments, patterning the barrier layer includes defining the barrier layer having a uniform thickness across each of the plurality of structures. In some embodiments, the method further includes doping the first polysilicon layer. In some embodiments, doing the first polysilicon layer includes doping the first polysilicon layer prior to patterning the first polysilicon layer.

The foregoing outlines features of several embodiments so that those skilled in the art may better understand the aspects of the present disclosure. Those skilled in the art should appreciate that they may readily use the present disclosure as a basis for designing or modifying other processes and structures for carrying out the same purposes and/or achieving the same advantages of the embodiments introduced herein. Those skilled in the art should also realize that such equivalent constructions do not depart from the spirit and scope of the present disclosure, and that they may make various changes, substitutions, and alterations herein without departing from the spirit and scope of the present disclosure. 

What is claimed is:
 1. A method of making a semiconductor device, the method comprising: depositing a first polysilicon layer over a substrate; forming a barrier layer over the first polysilicon layer; patterning the first polysilicon layer; depositing a second polysilicon layer over the barrier layer; and increasing a grain size of the first polysilicon layer simultaneously with depositing the second polysilicon layer, wherein at least one grain boundary in the first polysilicon layer contacts the barrier layer.
 2. The method of claim 1, wherein the patterning of the first polysilicon layer occurs prior to the forming of the barrier layer.
 3. The method of claim 1, wherein the patterning of the first polysilicon layer occurs after the forming of the barrier layer.
 4. The method of claim 1, wherein the depositing of the second polysilicon layer comprises depositing a portion of the second polysilicon layer in direct contact with the substrate.
 5. The method of claim 1, wherein the forming of the barrier layer comprises exposing the first polysilicon layer to oxygen.
 6. The method of claim 1, further comprising doping the first polysilicon layer.
 7. The method of claim 6, wherein the doping of the first polysilicon layer comprises performing an in-situ doping of the first polysilicon layer.
 8. The method of claim 6, wherein the doping of the first polysilicon layer occurs after the depositing of the second polysilicon layer.
 9. A method of making a semiconductor device, the method comprising: depositing a first polysilicon layer over a substrate; patterning the first polysilicon layer to define a plurality of polysilicon structures; forming a barrier layer over the plurality of polysilicon structures; and depositing a second polysilicon layer over the barrier layer, wherein the depositing of the second polysilicon layer comprises increasing a grain size of the first polysilicon layer in each of the plurality of polysilicon structures, and causing a grain boundary in at least one of the plurality of polysilicon structure to contact the barrier layer.
 10. The method of claim 9, further comprising doping the plurality of polysilicon structures.
 11. The method of claim 10, wherein doping the plurality of polysilicon structures comprises doping the plurality of polysilicon structures prior to forming the barrier layer.
 12. The method of claim 10, wherein doping the plurality of polysilicon structures comprises doping the plurality of polysilicon structures after forming the barrier layer.
 13. The method of claim 9, wherein depositing the second polysilicon layer comprises blanket depositing the second polysilicon layer.
 14. The method of claim 9, wherein forming the barrier layer comprises forming the barrier layer comprising: a first portion in a central region of a polysilicon structure of the plurality of polysilicon structures, the first portion having a uniform thickness, and a second portion in a peripheral region of the polysilicon structure, the second portion having a variable thickness.
 15. The method of claim 9, wherein forming the barrier layer comprises depositing the barrier layer.
 16. The method of claim 9, wherein forming the barrier layer comprises oxidizing the plurality of polysilicon structures.
 17. A method of making a semiconductor device, the method comprising: depositing a first polysilicon layer over a substrate; forming a barrier layer over the first polysilicon layer; depositing a second polysilicon layer over the barrier layer, wherein the depositing of the second polysilicon layer comprises increasing a grain size of the first polysilicon layer, and the grain size of the first polysilicon layer, following the depositing of the second polysilicon layer, is greater than a grain size of the second polysilicon layer; and patterning the first polysilicon layer, the barrier layer and the second polysilicon layer to define a plurality of structures.
 18. The method of claim 17, wherein patterning the barrier layer comprises defining the barrier layer having a uniform thickness across each of the plurality of structures.
 19. The method of claim 17, further comprising doping the first polysilicon layer.
 20. The method of claim 19, wherein doping the first polysilicon layer comprises doping the first polysilicon layer prior to patterning the first polysilicon layer. 